MRL Cyclone 640 Drive Diffusion Furnace System

Asset # : 61186
Equipment Make: MRL
Equipment Model: Cyclone 640
Type: Drive Diffusion Furnace System
Wafer Size:
Equipment Configuration:

– Software: GMI Host
– Controller: MRL ICCI
– Heating element type: 004400779062 R00
– Ovens 1,2,3 have 6″ Poly-Silicon tubes installed (217mm diameter)
– Oven 4 has 6″ SiC tube (215mm diameter)
– All ovens have SiC paddles
– Machine is configured for N2, O2, H2
– Original torches are installed & functional
– Functional & calibrated MFCs for all gas lines
– Original board is operational
– All 4 ovens have connected bubbler systems, integrated with N2 carrier flow
– All 4 ovens have flame detectors for Wetox
– 12 original eurotherm, used for controlling all 4 ovens
– Functional electro-preumatic control system with digital output

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  • Added: September 8, 2021

  • Views: 33

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