MRL Cyclone 640 Drive Diffusion Furnace System
Asset # :
61186
Equipment Make:
MRL
Equipment Model:
Cyclone 640
Type:
Drive Diffusion Furnace System
Wafer Size:
Equipment Configuration:
– Software: GMI Host
– Controller: MRL ICCI
– Heating element type: 004400779062 R00
– Ovens 1,2,3 have 6″ Poly-Silicon tubes installed (217mm diameter)
– Oven 4 has 6″ SiC tube (215mm diameter)
– All ovens have SiC paddles
– Machine is configured for N2,
Send BTG Message:
InquireAd Details
-
Added: September 8, 2021
-
Views: 111