MRL Phoenix 836 4 Stack Diffusion Furnace

Asset # : 61185
Equipment Make: MRL
Equipment Model: Phoenix 836
Type: 4 Stack Diffusion Furnace
Wafer Size:
Equipment Configuration:

– Software: GMI Host
– Controller: MRL ICCI
– Heating element type: MRL AZTEC HELIX 0440803538 R00
– Ovens 1,2,3 have Poly-Si tubes installed for processing wafers up to 5″. Tube inner diameter = 180mm
– Oven 4 has 6″ Quarz tube. Inner diameter = 217mm
– SiC paddles for all ovens
– Machine is configured for N2, O2, H2
– Original torches are installed and functional
– MFCs functional and calibrated for all gas lines
– Original board is operational
– 3 ovens have connected bubbler systems, integrated with N2 carrier flow
– 4th oven has space for integrating another bubbler system
– 12 original eurotherm to control all 4 ovens
– Functional electro-preumatic control system with digital output

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  • Added: September 8, 2021

  • Views: 28

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