Nikon NSR S 204 B–Sold
Asset # :
60780
Equipment Make:
Nikon
Equipment Model:
NSR S 204 B
Type:
Wafer Size:
8"
Equipment Configuration:
Resolution: ≤ 180 nm
– SMP Result = 165nm
Distortion: Dynamic: ≤+/-20nm (X and Y)
– X =10nm y =1nm
Mag Control Accuracy: <+/-10nm
- H-I = 3.5nm
- C-I = 4.0nm
Max Exposure Area:
- 25mm x 33mm
Reticle Blinds Accuracy: .4mm to .8mm
- y= 0.7 x=.65
Reticle
Equipment Pictures:
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Added: July 21, 2021
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Views: 428