Hitachi S 4800 Type I Cold Field Emission Gun Scanning Electron Microscope (Cold FEG SEM)

Asset # : 60686
Equipment Make: Hitachi
Equipment Model: S 4800
Type: Type I Cold Field Emission Gun Scanning Electron Microscope (Cold FEG-SEM)
Wafer Size:
Equipment Configuration:

– Specimen stage: manual stage
– Imaging modes: (2) SE Detectors
– Horiba EDS
– Resolution: 1.5 nm at 15 kV, 2.1 nm at 1 kV
– Accelerating voltage: 0.5 kV to 30 kV (in 100 V steps)
– Operating system: Windows xp

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  • Added: July 6, 2021

  • Views: 18

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