Novellus Concept One PECVD System Sold

– Nitride, Oxide SiO2
Includes:
– AE RFG 3000 High Frequency Generator
– AE PDX 1400 Low Frequency Generator
– MKS 600 Series Pressure Controller
– Watlow Chamber Temp Controller
– Granville Philips 375 Vectron Load Lock Pressure Ready VAT Adaptive Pres