Canon FPA 2000 i 1 Stepper Sold

Asset # : 60473

Equipment Make: Canon

Equipment Model: FPA 2000 i 1

Type: Stepper

Wafer Size:

Equipment Configuration:

Exposure capabilities:
– Projection lens: UL31
– Magnification: 1/5 Times
– Numerical Aperture (NA): 0.52
– Resolution: 0.5µm L&S / less
– Image field size: Φ 28.3mm (22.5 x 17.1 m) Exposure wave length: i-Line (365 nm)
Illumina time system:
– Light sourc

Equipment Pictures: