Applied Materials 5200 Centura Dry Oxide Etch Cluster Tool

Asset # : 60365
Equipment Make: Applied Materials
Equipment Model: 5200 Centura
Type: Dry Oxide Etch Cluster Tool
Wafer Size:
Equipment Configuration:

– 208V, 3ph, 60Hz, 72kVA
Includes:
– Dual process chambers
– Control/power cabinet w/ transformer module
– Seiko turbopump controllers
– RF cabinet w/ 2ea ENI OEM-12B3 RF generators
– 2ea BOC Edwards iQDP80 vacuum pumps
– 2ea iQDP40 vacuum pumps
– 2ea SMC INR-496-002D-X007 recirculating chillers

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Ad Details

  • Added: June 10, 2021

  • Views: 26

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