Applied Materials 5200 Centura Dry Oxide Etch Cluster Tool Sold

– 208V, 3ph, 60Hz, 72kVA
Includes:
– Dual process chambers
– Control/power cabinet w/ transformer module
– Seiko turbopump controllers
– RF cabinet w/ 2ea ENI OEM-12B3 RF generators
– 2ea BOC Edwards iQDP80 vacuum pumps
– 2ea iQDP40 vacuum pumps
– 2ea SMC