Novellus Concept Two Sequel CVD Cluster Tool

Asset # : 60351
Equipment Make: Novellus
Equipment Model: Concept Two Sequel
Type: CVD Cluster Tool
Wafer Size:
Equipment Configuration:

Includes:
– 2ea oxide deposition process chambers
– Power cabinet w/ 2ea Advanced Energy PDX-1400 power supplies, ENI OEM-50 XL RF generator, ENI OEM-50 RF generator
– Power control cabinet, 208V, 3ph, 60Hz
– 2ea BOC Edwards QDP80 vacuum pump w/ QMB1200 booster
– Toshiba 1400XL Plus UPS

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  • Added: June 9, 2021

  • Views: 32

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