Santa Clara Plastics (SCP) Evolution E 200 Wet Bench
Asset # :
59610
Equipment Make:
Santa Clara Plastics
Equipment Model:
Evolution E 200
Type:
Wet Bench
Wafer Size:
8"
Equipment Configuration:
Load/Unload - Dual SMIF Arm with Wafer Transfer System (LRL Flow)
-Sulfuric Module
-Hot QDR + Megasonic Module
-SC1 Module
-HF Diluted Module
-QDR Module
-BHF Module
-SCP Green Dryer + End Effector Wash/Dry Modules Has communication issues between robotic
Equipment Pictures:
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Added: May 11, 2021
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Views: 48