Santa Clara Plastics (SCP) Evolution E 200 Wet Bench

Asset # : 59610
Equipment Make: Santa Clara Plastics (SCP)
Equipment Model: Evolution E 200
Type: Wet Bench
Wafer Size: 8"
Equipment Configuration: Load/Unload - Dual SMIF Arm with Wafer Transfer System (LRL Flow) -Sulfuric Module -Hot QDR + Megasonic Module -SC1 Module -HF Diluted Module -QDR Module -BHF Module -SCP Green Dryer + End Effector Wash/Dry Modules Has communication issues between robotic arm and main computer. Fire suppression system defect
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  • Added: May 11, 2021

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