Accretech / TSK UF 3000 Prober

Asset # : 59035
Equipment Make: Accretech / TSK
Equipment Model: UF 3000
Type: Prober
Wafer Size: 12"
Equipment Configuration:

– X,Y Overall Accuracy：±2.0µm (Temp Stability ±1℃)
– X,Y Stage Accuracy：±1.0µm
– Z Axis Stroke(Applicable stroke)：37mm
– Z Axis Control Accuracy：±2µm
– Stage Durability：200kgf
– Hot &Cold chuck
– Chiller：SCU-600
– Temp. Range：-40 to 150℃
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  • Added: March 12, 2021

  • Views: 158

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