Axcelis Gemini GPL MCU 202–
Asset # :
58820
Equipment Make:
Axcelis
Equipment Model:
Gemini GPL MCU 202
Type:
Wafer Size:
6"
Equipment Configuration:
– 2 Process Chambers
– Quartz tubes
– 2KW Magnetron
– Lamp Heated
– 2x Temperature Controllers
– 3 MFC’s/ Chamber
– 1 Robot 3 Axis
– 1 Cooling Station
– 2 Cassette Stations
– 380VAC/50Hz Uitvoering
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Added: February 19, 2021
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Views: 762