Axcelis Gemini GPL MCU 202–

Asset # : 58820
Equipment Make: Axcelis
Equipment Model: Gemini GPL MCU 202
Type:
Wafer Size: 6"
Equipment Configuration:

– 2 Process Chambers
– Quartz tubes
– 2KW Magnetron
– Lamp Heated
– 2x Temperature Controllers
– 3 MFC’s/ Chamber
– 1 Robot 3 Axis
– 1 Cooling Station
– 2 Cassette Stations
– 380VAC/50Hz Uitvoering

Equipment Pictures:

Send BTG Message:

Inquire

Ad Details

  • Added: February 19, 2021

  • Views: 762

Description

Tags :