Asyst–SMIF Wafer Case Transfer Pod

Asset # : 58528
Equipment Make: Asyst
Equipment Model:
Type: SMIF Wafer Case Transfer Pod
Wafer Size: 8"
Equipment Configuration:

– Internal Wafer Transport Carrier: Entegris KA198-80MB STAT-PRO 3000, 25 slots
– Part Number: 4001-7102-01, 4001-4302-XX
– Carrier seems to be in good condition

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  • Added: February 4, 2021

  • Views: 23

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