Canon FPA 5000 ES 2+ Stepper
Asset # :
58433
Equipment Make:
Canon
Equipment Model:
FPA 5000 ES 2 +
Type:
Stepper
Wafer Size:
8" & 12"
Equipment Configuration:
– High NA covers 0.18 um to 0.15 um design rules using 248 KrF illumination
– The Platform features a reaction force receiver on both the reticle and wafer stages.
– Active dampers are added to the wafer stage to prevent machine vibrations from occurring
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Added: January 28, 2021
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Views: 341