Axcelis Optima HDxT Ion Implanter

Asset # : 58270

Equipment Make: Axcelis

Equipment Model: Optima HDxT

Type: Ion Implanter

Wafer Size: 12"

Equipment Configuration:

– Missing parts: Robot pick on EFEM Robot. Loadport
– 4 loadports
– Software version: 2.9.0
– SECS/GERM interface
– Protocol Zones: FEOL, MOL
Roughing Pumps:
– Edwards IGX100L
– Edwards iGX100M
– Edwards iGX600M
Cryo Pumps:
– (2) Brooks: 320FE
– (1) Brook

Equipment Pictures: