Nikon i 11 D Stepper

– Configured for 4″, compatible with 4″, 6″, 8″
– Reticle Size: 6″
– Resolution: 0.35um
– DOF: 1um
– Active Focus Range: +/- 0.15um
– N.A.: 0.63
– UPH (when 4″ PSS): 40ea
– Field Size: 22mm x 22mm
– Reticle Mag.: 1.05
– Wavelength: i-Line (365nm)
– Lamp P