Aixtron R 6 Close Coupled Showerhead MOCVD Sold

– GaN
– Loader/transfer Module
– Edwards nXDS15i vacuum pump
– Process module
– Edwards nXDS10i vacuum pump
– Gast Vacuum pump (x2)
– SMC HRS030-WN-20-T Chiller
– SMC Thermo-Con INR-244-781 Thermoelectric bath (x2)
– Thyrobox HPDU high power distribution unit
– 380-400VAC, 3ph, 50/60Hz
– Jupiter Scientific dry abatement unit
– Lytron EWD-15EL-FD12CBD0 heat exchanger
– Edwards GXS750/2600F MKII HV MD Vacuum pump
– MV Products dual cold trap
– SMC MRS050-WN-20 Chiller