Aixtron R 6 Close Coupled Showerhead MOCVD Sold

Asset # : 57964
Equipment Make: Aixtron
Equipment Model: R 6
Type: Close Coupled Showerhead MOCVD
Wafer Size:
Equipment Configuration:

– GaN
– Loader/transfer Module
– Edwards nXDS15i vacuum pump
– Process module
– Edwards nXDS10i vacuum pump
– Gast Vacuum pump (x2)
– SMC HRS030-WN-20-T Chiller
– SMC Thermo-Con INR-244-781 Thermoelectric bath (x2)
– Thyrobox HPDU high power distribution unit
– 380-400VAC, 3ph, 50/60Hz
– Jupiter Scientific dry abatement unit
– Lytron EWD-15EL-FD12CBD0 heat exchanger
– Edwards GXS750/2600F MKII HV MD Vacuum pump
– MV Products dual cold trap
– SMC MRS050-WN-20 Chiller

Equipment Pictures:

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  • Added: December 7, 2020

  • Views: 96

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