Lam Sabre 3 D FI MOD Plating Tool Sold
Asset # :
57768
Equipment Make:
Lam
Equipment Model:
Sabre 3 D FI MOD
Type:
Plating Tool
Wafer Size:
12"
Equipment Configuration:
– Software version: 1.60 Build 11
– SIM: SECS GEM
– Process: Cu plating
– FOUP (quantity 3)
– Handler system: Standard Front and Central robot (qty. 2)
– Options: Chemical Analysis Unit
– Chiller (1)
Equipment Pictures:
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Added: November 16, 2020
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Views: 872