Canon MPA 600 Super Mask Aligner Sold

Asset # : 57449
Equipment Make: Canon
Equipment Model: MPA 600 Super
Type: Mask Aligner
Wafer Size: 4", 5", 6"
Equipment Configuration:

– Resolution: 1.5 um
– Illumination: 2 KW High Pressure Mercury Lamp. Intensity @ 1800 watts power output.
– CTC: Monitors and controls system temp within +/- 3 degrees C
– Automatic Pneumatic Distortion Control: provides fine distortion compensation
– Depth of focus: +/- 6 um (linewidth 1.5 um)
– Auto Alignment: LBS AA 3Sigma < 0.58um (HeNe Laser beam scan). TV AA 3 Sigma < 0.43um (TV image processing)

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  • Added: October 9, 2020

  • Views: 71

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