ASM E 3200 Epi Deposition System

Asset # : 57225
Equipment Make: ASM
Equipment Model: E 3200
Type: Epi Deposition System
Wafer Size: 12"
Equipment Configuration:

– Gas Panel Notes :- All gas module components ( MFCs etc.) are installed.
– The only change is: GeH4 MFC size is 200 sccm

– EPI104 was used only for SiGe-Process.
– No dopant gases were hooked up.
– Software version: V7.63
– CIM: SECS/GEM
– Process: Epitaxie
– Foup: 2
– Handler system: Asyst FI
– Handler system: Genmark Transfer
– Options system: OS9

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  • Added: October 9, 2020

  • Views: 37

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