ASM E 3200 Epi Deposition System

– Gas Panel Notes :- All gas module components ( MFCs etc.) are installed.
– The only change is: GeH4 MFC size is 200 sccm

– EPI104 was used only for SiGe-Process.
– No dopant gases were hooked up.
– Software version: V7.63
– CIM: SECS/GEM
– Process: Ep