STS / SPTS MACS ICP ETCH System
Asset # :
57099
Equipment Make:
SPTS / STS
Equipment Model:
MACS
Type:
ICP Etcher
Wafer Size:
6" - 8"
Equipment Configuration:
– ASE with Bosch process
– HR Chamber for High Rate Etch
– MACs Loader for Cassette to Cassette Operation (2 Load stations)
– Carousel vacuum load lock
– Helium Backside Cooling
– Clamp type: Standard WTC
– RF Generators: AE RFG3001, ENI ACG-3B
– Gases:
Equipment Pictures:
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Added: October 9, 2020
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Views: 305