STS / SPTS MACS ICP ETCH System

Asset # : 57099
Equipment Make: STS / SPTS
Equipment Model: MACS
Type: ICP ETCH System
Wafer Size: 6" - 8"
Equipment Configuration:

– ASE with Bosch process
– HR Chamber for High Rate Etch
– MACs Loader for Cassette to Cassette Operation (2 Load stations)
– Carousel vacuum load lock
– Helium Backside Cooling
– Clamp type: Standard WTC
– RF Generators: AE RFG3001, ENI ACG-3B
– Gases:
C4F8(200 sccm)、SF6(1000 sccm)、O2(200 sccm)、Ar (50 sccm)
– Load lock pump: Ebara AAL 10
– Chamber pump: Ebara A 30 W
– Chiller: Affinity PWG-160 L- BE 27 CBD 2

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  • Added: October 9, 2020

  • Views: 155

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