Lam Rainbow 4520 Dielectric Etch

Asset # : 57086
Equipment Make: Lam
Equipment Model: Rainbow 4520
Type: Dielectric Etch
Wafer Size: 6"
Equipment Configuration:

Includes:
– R/F rack
– Edwards pump duel
– Edwards pump single
– Edwards interface box
– Chiller (2)
– Power box

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  • Added: October 9, 2020

  • Views: 20

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