STS / SPTS MACS ICP HR Etch System
Asset # :
57039
Equipment Make:
SPTS / STS
Equipment Model:
MACS
Type:
ICP HR Etcher
Wafer Size:
8"
Equipment Configuration:
– Advanced Silicon Etch (ASE) with Bosch process
– HR Chamber for High Rate Etch
– Set up for 200mm wafer (150mm-200mm capable)
– MACs Loader for Cassette to Cassette operation (2 load stations)
– Carousel vacuum load lock
– Helium Backside Cooling (HBC)
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Added: October 9, 2020
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Views: 473