ASM A 412 Vertical Furnace
Asset # :
57016
Equipment Make:
ASM
Equipment Model:
A 412
Type:
Vertical Furnace
Wafer Size:
12"
Equipment Configuration:
– Arsenic Doped Poly/Ti Nitride
– Chemistry: TiCl4, NH3, NF3, Cl2, SiH4, AsH4
– Software Version: 6.85B
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Added: October 9, 2020
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Views: 190