ASM A 412 Vertical Furnace

Asset # : 57016
Equipment Make: ASM
Equipment Model: A 412
Type: Vertical Furnace
Wafer Size: 12"
Equipment Configuration:

– Arsenic Doped Poly/Ti Nitride
– Chemistry: TiCl4, NH3, NF3, Cl2, SiH4, AsH4
– Software Version: 6.85B

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  • Added: October 9, 2020

  • Views: 84

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