Oxford PlasmaPro NGP 1000 Plasma Enhanced Chemical Vapor Deposition (PECVD) Sold

– Load Locked Chamber
– System PC, Keyboard, Mouse
– Windows 7 w/ PC4000 Software
– 490mm Diameter Aluminum Lower Electrode
– Up to 400 degrees Celcius
– Chamber Heating Kit (Heats Chamber Sidewalls to Minimize Process Deposition)
– Dual Frequency RF wit