ASM Eagle XP CVD
Asset # :
56945
Equipment Make:
ASM
Equipment Model:
Eagle XP
Type:
CVD
Wafer Size:
12"
Equipment Configuration:
– w/ 2x Pulsar and 2x Emerald
– CIM: SECS/GEM
– Process: TiC/TiN
– Factory interface: FOUP x 3
– Handler System: FE and BE robots
– LL1, LL2, WHC and PM pumps and 1x scrubber (x8)
Equipment Pictures:
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Added: October 9, 2020
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Views: 146