ASM Eagle XP CVD

Asset # : 56945
Equipment Make: ASM
Equipment Model: Eagle XP
Type: CVD
Wafer Size: 12"
Equipment Configuration:

– w/ 2x Pulsar and 2x Emerald
– CIM: SECS/GEM
– Process: TiC/TiN
– Factory interface: FOUP x 3
– Handler System: FE and BE robots
– LL1, LL2, WHC and PM pumps and 1x scrubber (x8)

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  • Added: October 9, 2020

  • Views: 59

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