Nanometrics M 6100 Film Thickness
Asset # :
56942
Equipment Make:
Nanometrics
Equipment Model:
M 6100
Type:
Film Thickness
Wafer Size:
8"
Equipment Configuration:
– Handler: Olypus auto loaded AL 110 Series
– Number of films: up to 3
– Wafer sizes: 75-200 mm
– Optics: 4x, 10x, 15x (UV), 40x
– Computer: PC Computer with high capacity drive
– Has problem with auto focus
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Added: October 9, 2020
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Views: 259