Lam Rainbow 4720 Nitride Etcher Sold

Asset # : 56913
Equipment Make: Lam
Equipment Model: Rainbow 4720
Type: Nitride Etcher
Wafer Size: 8"
Equipment Configuration:

– SMIF System: Asyst 2200 indexer built-In (qty. 2)
– Handle System: Wafer notch alignment with spatula, Harmonic drive with wafer handler (qty. 2)
– Process chambers: Ecthing with gap motor driven
– RF Generator 1250W
– Remote AC box
– CIM: Yes
– Software version: E1.6-012A

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  • Added: October 9, 2020

  • Views: 63

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