Plasmatherm 700 Deposition System Components

Asset # : 56713
Equipment Make: Plasmatherm
Equipment Model: 700
Type: Deposition System Components
Wafer Size:
Equipment Configuration:

– Load / Transfer Module
– Process Module with VAT PM-7 Pressure Controller
– RFPP LF-5 Power Supply
– RF5-S Power Supply
– Astech ATL – 100RA/RFPP AM-5 Auto Matching Network
– Leybold Turbotronik NT20 Turbopump Controller
– RFPP Matching Network
– Power Control Cabinet 40 x 56 x 80″
– Power Control Cabinet 42 x 81 x 84″ (3)
– Power Control Cabinet 59 x 49 x 20″

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  • Added: October 9, 2020

  • Views: 124

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