Plasmatherm 700 Deposition System Components
Asset # :
56713
Equipment Make:
Plasmatherm
Equipment Model:
700
Type:
Deposition System Components
Wafer Size:
Equipment Configuration:
– Load / Transfer Module
– Process Module with VAT PM-7 Pressure Controller
– RFPP LF-5 Power Supply
– RF5-S Power Supply
– Astech ATL – 100RA/RFPP AM-5 Auto Matching Network
– Leybold Turbotronik NT20 Turbopump Controller
– RFPP Matching Network
– Power
Equipment Pictures:
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Added: October 9, 2020
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Views: 197