ASM Epsilon 3200 RP Epitaxial Silicon Deposition (EPI) System

Asset # : 56666
Equipment Make: ASM
Equipment Model: Epsilon 3200
Type: RP Epitaxial Silicon Deposition (EPI) System
Wafer Size: 12"
Equipment Configuration:

– Single Chamber
– Process: SiGe
– CIM: SECS/GEM
– FOUP (2)
– with Robot
– Options: Dakota GIB (2)
– Edwards Scrubber
– Not Included: Quartz Kit, RP Stack Kit

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  • Added: October 9, 2020

  • Views: 136

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