KLA Tencor 5100 Overlay

Asset # : 56584
Equipment Make: KLA-Tencor
Equipment Model: 5100
Type: Overlay
Wafer Size:
Equipment Configuration:

– Software version: MS Windows NT 4.00.1381
– Open cassette (qty. 2)
– Handler: In tool, underside wafer vacuum
– Auxiliary Fan Unit
– Auxiliary PC/Monitor

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Equipment Video:

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  • Added: October 9, 2020

  • Views: 47

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