KLA Tencor 5100 Overlay Sold
Asset # :
56584
Equipment Make:
KLA-Tencor
Equipment Model:
5100
Type:
Overlay
Wafer Size:
Equipment Configuration:
– Software version: MS Windows NT 4.00.1381
– Open cassette (qty. 2)
– Handler: In tool, underside wafer vacuum
– Auxiliary Fan Unit
– Auxiliary PC/Monitor
Equipment Pictures:
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Added: October 9, 2020
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Views: 223