Alcatel 602 E Etcher

Asset # : 56456
Equipment Make: Alcatel
Equipment Model: 602 E
Type: Etcher
Wafer Size:
Equipment Configuration:

With spare parts kit:
(1) / ALCATEL / CIT CFF / Turbo controller
(1) / ALCATEL / CIT CFF 450 / Turbo controller
(1) / GENMARK / – / Robot
(1) / ALCATEL / CFV 900 / Turbo controller
(1) / ALCATEL / CFV 900 turbo 306/700 / Turbo controller
(1) / ALCATEL / CIT / Turbo pump
(1) / – / 5001692 / Quartzdom for A 602 HMB 9916
(1) / RFPP / RF30S / RF Generator
(1) / RFPP / AMN502 / Matching unit
(1) / GENMARK / S08RE / Robot controller
(1) / MKS / 252-14578 / Exhaust valve controller
(1) / ACME / 25A-9400002-A / Power supply
(1) / ASTEC / ACV15D3,0 / Power supply
(2) / RFPP / AMNPS-25 / Matching controllers
(1) / ALCATEL / – / Power supply
(1) / VAT / 01232-KA44-0001/0683 / Valve
(1) / MKS / GV50A110302RBN020 / MFC 300 SCCM SF6
(2) / MKS / GV50A015501RBV020 / MFC 50 SCCM O2
(2) / MKS / GV50A001302RBV020 / MFC 300 SCCM He
(1) / MKS / GV50A049501RBV020 / MFC 50 SCCM CHF3
(1) / MKS / GV50A001202RBV020 / MFC 200 SCCM He
(1) / MKS / GV50A063501RBV020 / MFC 50 SCCM CF4
(1) / MKS / 2259CC-00200RVSPC1 / Viton / MFC 50 SCCM CF4
(1) / MKS / 2259C-00200 RV / Viton / MFC 200 SCCM N2
(1) / MKS / 2259C-00100RV-SPCAL / MFC 50 SCCM CHF3
(2) / MKS / 2259C-00050RV-SPCAL / MFC 50 SCCM O2
(1) / MKS / 2259CC-00500RVSPC2 Viton / MFC 300 SCCM He
(1) / MKS / 2259C-01000RV-SPCAL / MFC 300 SCCM SF6
(1) / MKS / 2179B00122CR1BV Viton / MFC 200 SCCM He
(1) / MKS / 2179AX51CR1BV / MFC 50 SCCM O2
(1) / MKS / 2259C00200RV-SPCAL / MFC 200 SCCM He
(1) / MKS / 2259CC-00050RVSPC1 / MFC 50 SCCM O2
(1) / MKS / 2259CC-00100RVSPC1 / Viton / MFC 50 SCCM CHF3
(1) / MKS / 2259C-00200RV-SPCAL / MFC 300 SCCM He
(1) / MKS / 2179BX22CR1BVSPC1 / MFC 50 SCCM CF4
(1) / MKS / 2259CC-01000RNSPC1 / MFC 300 SCCM SF6
(1) / MKS / 627A.1TBD / Baratron 0,1 torr
(1) / MKS / 627A11TBC / Baratron 10 torr
(1) / MKS / 627D.1TBD1B / Baratron 0,1 torr
(1) / MKS / 627B11TBC1B / Baratron 10 torr
(1) / MKS / 627B.1TBD1B / Baratron 0,1 torr
(1) / MKS / 627D11TBC1B / Baratron 10 torr
(1) / GE FANUC / IC693ALG220G / Input analog, 4 PT voltage
(1) / GE FANUC / IC693ALG390D / Output analog, 2 PT voltage
(1) / GE FANUC / IC693ALG390F / Output analog, 2 PT voltage
(1) / GE FANUC / IC693MDL655 / Input, 24 VDC 32 Positive / Negative fast
(1) / GE FANUC / IC693MDL740E / Output, 12/24 VDC.5A 16PT positive
(1) / GE FANUC / IC693MDL740G / Output, 12/24 VDC.5A 16PT positive
(1) / GE FANUC / IC693MDL753G / Output, 12/24 VDC.5A 32PT positive
(1) / GE FANUC / IC693MDL940H / Output, relay 2A 16 PT
(1) / GE FANUC / IC693CPU331T / CPU Module
(1) / GE FANUC / IC693PCM301P / Programmable co procedure
(1) / GE FANUC / IC693PCM301G / Programmable co procedure
(1) / GE FANUC / IC693PWR321AA / Power supply, 24 VDC. 8A
(1) / GE FANUC / – / Proficy machine edition 7,0 SW
(1) / PLASMA PHYSICS /  MPM4 / Multi-channel process monitor (End point det)
(2) / ALCATEL / SEM100 / –
(1) / – / MKS 93-0501 / High vacuum valve
(1) / ALCATEL / 24324-KA41-0001/676 / High vacuum valve
(1) / MEMBRANE / – / Bellow high vacuum ID26mm,OD 46mm
(1) / MKS / GRANVILLE-PHILLIPS /  275 / Mini-convectron / 275806-EU
(1) / GRANVILLE PHILLIPS / 275 / 20275-646 / Convectron gauge
(1) / GRANVILLE PHILLIPS / 275203 / Convectron gauge
(1) / GRANVILLE PHILLIPS / 343004-EU / Mini ion gauge
(1) / ALCATEL / 602 / Etcher (Set of spec parts)
 
Qty / Description
(12) / Alu shower heads
(24) / O-rings
(5) / Vent valves
(4) / Flex tubes cooling
(2) / Chuck rings
(5) / Heaters big
(16) / Heaters small
(1) / Thermo controller
(2) / Alu Plates
(1) / Photo multiplier tube
(3) / Inline valves
(11) / Lubrication syringes
(5) / Thermo switches
(2) / Light switch upper
(4) / Light switch lower
(1) / Assortment of  special screws
(6) / Alu mounting discs
(25) / Teflon rings
(1) / Bellow 8,5 cm ID
(1) / Pneumatic valve array
(1) / Glass window 100 mm
(1) / RGV RF foil
(5) / Mounting rings Alu
(2) / Vacuum feedthroughs
(1) / Vacuum rotor
(1) / RGV Viewport

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  • Added: October 9, 2020

  • Views: 243

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