Veeco D 180 MOCVD Reactor

– GaN
– Metal Organic sources: (1) Ga, (1) In, and (1) Al
– Hydride source (1) NH3
– Doping sources (2) NH3
– Pumps included: EBARA A70W (refurbished), Varian 300 scroll Dry pump, Leybold TMP 150 Turbo pump
CTC 2700 controller
Chillers included: Neslab RT