Veeco D 180 MOCVD Reactor

Asset # : 56455
Equipment Make: Veeco
Equipment Model: D 180
Type: MOCVD Reactor
Wafer Size:
Equipment Configuration:

– GaN
– Metal Organic sources: (1) Ga, (1) In, and (1) Al
– Hydride source (1) NH3
– Doping sources (2) NH3
– Pumps included: EBARA A70W (refurbished), Varian 300 scroll Dry pump, Leybold TMP 150 Turbo pump
CTC 2700 controller
Chillers included: Neslab RTE111(4), Techne RB-5A
– Delatech 859 CDO exhaust gas scrubber 850°C (adjustable to 975°C for low flows). 
– 2-cylinder silane gas cabinet also available.

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  • Added: October 9, 2020

  • Views: 128

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