Tel ACT 8 Photo Resist Coater

Asset # : 56390
Equipment Make: Tel
Equipment Model: Act 8
Type: Photo Resist Coater
Wafer Size: 8"
Equipment Configuration:

– Dual Block
– 4x Coat, 4x Develop
– Right to Left Wafer Flow
– 4COT (2COT+2TCT) + 4DEV + 1IFB
– Full oven configuration with 6PHP
– Block#2 : 2ADH, 4CPL, 7LHP (5LHP on Central Stack), 4HHP, 1TRS, 1TCP, 2CWH
– Block#3 : 6PHP, 8LHP (5LHP on Central Stack)

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Ad Details

  • Added: October 9, 2020

  • Views: 486

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