Tel ACT 8 Photo Resist Coater
Asset # :
56390
Equipment Make:
Tel
Equipment Model:
Act 8
Type:
Photo Resist Coater
Wafer Size:
8"
Equipment Configuration:
– Dual Block
– 4x Coat, 4x Develop
– Right to Left Wafer Flow
– 4COT (2COT+2TCT) + 4DEV + 1IFB
– Full oven configuration with 6PHP
– Block#2 : 2ADH, 4CPL, 7LHP (5LHP on Central Stack), 4HHP, 1TRS, 1TCP, 2CWH
– Block#3 : 6PHP, 8LHP (5LHP on Central Stack)
Send BTG Message:
InquireAd Details
-
Added: October 9, 2020
-
Views: 486