Bruker D 8 Fabline X ray Diffractometer

Asset # : 56279
Equipment Make: Bruker
Equipment Model: D 8 Fabline
Type: X-ray Diffractometer
Wafer Size: 12"
Equipment Configuration:

– High Brightness (2KW) Bruker Rotating Anode HB-TXS
– SMIF System: Spartan EFEM dual load port for 300mm wafers (2) Brooks Automation
– Handler System: UMC 300 wafer stage with short tracks on primary side
– Options: Primary optics for micro diffraction, TXS X-ray system, LynxEye detector for secondary side + mount, Waferchuck
– Pattern recognition software
– Keyence laser triangulation module for fast height alignment
– Software version: 77-2.3A-6A-5A-5A-R6A
– CIM: E84, SECS/GEM, GEM300

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  • Added: October 9, 2020

  • Views: 137

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