Tel Alpha 8 SE Vertical Furnace Sold

Asset # : 56205
Equipment Make: Tel
Equipment Model: Alpha 8 SE
Type: Vertical Furnace
Wafer Size:
Equipment Configuration:

– DCS: HTO / TEOS
– System layout deep bay (I-type) furnace + UP/box
Cabinets / Units / Controllers:
– Furnace cabinets (including: Ultra-clean air flow system)
– Scavenger and water cooling unit
– Main controller (WAVES)
Cassette and wafer handling automation:
– Boat elevator
– Wafer counter and 6-inch SiC wafer flat alignment (on I/O port) & 21 cassette storage
– Integrated gas system for DCS: HTO / TEOS process
– LP-CVD DCS-HTO, TEOS exhaust configuration
– US Safety S2-93
– Mid temp heater: 200mm heating element:
– N2 load lock system
– Maintenance jig
– UPS
– Ingenio connection

Equipment Pictures:

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  • Added: October 9, 2020

  • Views: 364

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