Axcelis Purion M High Temperature SiC Ion Implanter Sold

Asset # : 56203
Equipment Make: Axcelis
Equipment Model: Purion M
Type: High Temperature SiC Ion Implanter
Wafer Size: 8"
Equipment Configuration:

– 335 KeV Terminal Voltage Module
– TDK TAS300 LP with Mapping
– 200mm ESC
– Moly ELS Source, Spr Clamp, VAp, Lined
– (2) AEF Cryo Pumps
– Cryo Pump Kit: 3 x FX Cryos
– Cryo Compressor IS2000
– Heat Exchanger Remote 50 Feet
– Gas Panel Assy with #7 Bottle
– CGA 580 1/4″ Fitting
– Process Chamber Liners
– Machine Overhead Exhaust Kit
– Terminal RP1 Floor Exhaust

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  • Added: October 9, 2020

  • Views: 534

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