Axcelis Purion M High Temperature SiC Ion Implanter Sold
Asset # :
56203
Equipment Make:
Axcelis
Equipment Model:
Purion M
Type:
High Temperature SiC Ion Implanter
Wafer Size:
8"
Equipment Configuration:
– 335 KeV Terminal Voltage Module
– TDK TAS300 LP with Mapping
– 200mm ESC
– Moly ELS Source, Spr Clamp, VAp, Lined
– (2) AEF Cryo Pumps
– Cryo Pump Kit: 3 x FX Cryos
– Cryo Compressor IS2000
– Heat Exchanger Remote 50 Feet
– Gas Panel Assy with #7 Bottle
Equipment Pictures:
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Added: October 9, 2020
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Views: 898