Accretech / TSK UF 3000 Prober

Asset # : 56084

Equipment Make: Accretech / TSK

Equipment Model: UF 3000

Type: Prober

Wafer Size:

Equipment Configuration:

– HDD not included
– X,Y Overall Accuracy：± 2.0um (Temp Stability ±1C
– X,Y Stage Accuracy：±1.0µm
– Z Axis Stroke(Applicable stroke)：37mm
– Z Axis Control Accuracy：±2µm
– Stage Durability：200kgf
– Hot chuck
– Temp. Range：50 to 150C

Equipment Pictures: