Axcelis HC 3 High Current Implanter

Asset # : 56028
Equipment Make: Axcelis
Equipment Model: HC 3
Type: High Current Implanter
Wafer Size: 12"
Equipment Configuration:

– Software version: 2.7.1
– CIM: SECS GEM
– FOUP: 4
– Handler System: Buffer Robot
– Subfab PD Compressors Chillers: 4
– Power supply not working

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  • Added: October 9, 2020

  • Views: 259

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