Axcelis HC 3 High Current Implanter
Asset # :
56028
Equipment Make:
Axcelis
Equipment Model:
HC 3
Type:
High Current Implanter
Wafer Size:
12"
Equipment Configuration:
– Software version: 2.7.1
– CIM: SECS GEM
– FOUP: 4
– Handler System: Buffer Robot
– Subfab PD Compressors Chillers: 4
– Power supply not working
Equipment Pictures:
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Added: October 9, 2020
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Views: 338