KLA Tencor SP 1 TBi Non Pattern Inspection System

Asset # : 56023
Equipment Make: KLA-Tencor
Equipment Model: SP 1-TBi
Type: Non Pattern Inspection System
Wafer Size: 6", 8"
Equipment Configuration:

– Current SW Version: MX 4.1 Build 6224
– Operating system / Windows NT 4.0, Build1381
– Handler type: 4 X 200 mm Open handler type
– Signal Light Tower (4 color) (R,B,O,G)
– Power requirement : V200/208  V220/240, 50/60Hz
– System Optics
1 DIC
2 DIC Calibration
3 GEM/SECS ( CommPort)
4 GEM/SECS ( HSMS )
5 Haze Analysis
6 Haze Normalization
7 Oblique
8 XY Coordinates

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  • Added: October 9, 2020

  • Views: 244

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