Applied Materials Mirra Track 3400 CMP POXI Sold

Asset # : 55943
Equipment Make: Applied Materials
Equipment Model: Mirra Track 3400
Type: CMP POXI
Wafer Size: 8"
Equipment Configuration:

– FABS Cassette System
– CIM: Linked
Software:
– Polisher: MB60a1
– Cleaner: Version 2.2.2a
– Endpoint: IB11j2
– CPU: Pentium III 400MHz
– Dual RAID HardDisk: 68MB, RAM 128MB
Hardware:
– Polisher with Controller: Mirra 3400 / 5201
– Cleaner: Ontrak
– Indexer: Rorze FABS
– Slurry (P1+P2+P3): AB each
– Endpoint Laser P1: Legacy Non FS
– Endpoint Laser P2: Legacy Non FS
– Polisher Middle Skins: Clear
– Com Port Server: Digi EL 160
– Cleaner Brush LDM with Entegris flow sensors
– Slurry in CLC
– Slurry Arm: 2 lines
– Polishing Head: Titan I
– Rotary Union: 3 port
– Cross Type: Cattrack
– Cassette slot run order (from Slot 1 down to 25)
– No chiller
Consumable:
– Platen Teflon Coated
– Universal Pad Conditioner
– AEP II Retainer Ring
– Silicone Membrane
– DDF3 Diaphragm
– New Aion Ontrak Brush
Upgrade / CIP Retrofit:
– Self Align LLA Guide Pin
– PM Reduction Kit
– UPA: Waterfall
– Exhaust Blower
– Magnehelic Pressure Low Level – Detection Kit
– SRD Exhaust Interlock
– Queue Tub
– No Blackout Covers
– No Splash Guard
– Missing parts: Slip ring (3), PC3 End Effector, Platen 3 Lower Skin

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  • Added: October 9, 2020

  • Views: 155

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