Tel Trias Ti/TiN Chamber

– 2 Chambers
Gas Supply Config:
– Manual valve N*
– Regulator (N2-1/N2-2)
– Regulator (N2-PF)
– Regulator (Ar)
– Manual valve (Dry air line)
– Pressure sensor (All gas line): No
– Filter (N2-PF): No
– Filter (Dry air line): No
– Regulator (Dry air line): No
– Pressure sensor (Dry air line): No
– Pressure gauge (Dry air line): No
Chamber Tel TRIAS Tin:
– 1333Pa Manometor
– 133kPa Capacitance manometer
– O-rings, Cubic Trap I/O
Gate Valve (Slit Valve):
– APC Valve
– Cubic Trap
– Vacuum valve (VEP1)
– 2 Chambers
– Vacuum valve (VEP2,3)
– Pressure Gauge, exhaust system
– Water Leak Sensor
– Flow Meter for cooling water: No
Gas Box Configuration:
– Gas Stick 1 through 8
– DLI
– Heater Bottom Purge
– Air Operation Valves
– Gas Filters
– Regulators
– Gas lockout system
Kit Parts:
– Stage Heater Assy, ELPR STG HTR – Ver2.4 ( Ver2.5)
– TiN Shower Base
Includes:
– Plate Shower Spacer 300tin S1
– Plate Shower Head 300tin
– Block Gas Diffusion
– Screw Long Head M6x15
– Screw M6x28
– Spring Washer Spak M6
– Tube Gas Inlet 300tin
– Washer Flat..M6 Ma22 Rglr:
– Ti Shower Head
– Ti Quartz Filler
– TiN Shower Plate
– TiN Shower Block