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Varian M 2 i Sputtering System
Varian M 2 i Sputtering System
Varian M 2 i Sputtering System
Varian M 2 i Sputtering System
Varian M 2 i Sputtering System
Varian M 2 i Sputtering System
Varian M 2 i Sputtering System
Varian M 2 i Sputtering System
Varian M 2 i Sputtering System

Varian M 2 i Sputtering System

Asset #: 55516

Make: Varian

Model: M 2 i

Wafer Sizes: 6, 8 inch

Varian M 2 i Sputtering System, 6", 8"
- Deposition magnet type: U3 or U5 magnet
- Automatic, cassette-to-cassette wafer handling (6" metal cassette)
- 25 slot metal cassette (2ea)
- Rough pump: iQDP80 (3ea)
- CTI 8F on board Cryo Pump with manual & auto regeneration (5 system)
- CTI 9600 compressor (2 system)
- 12KW D.C solid state power supply for each sputtering source
- Alpha version GUIK system
- Varian 250A load lock turbo pump
- Neslab DI Chiller for PCW flow
- Signal tower, special tool, EMO button install
Installed:
- Touch monitor for operation
- Process shield kit
- RF etch shield kit

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