Varian M 2 i Sputtering System Sold
Asset # :
55516
Equipment Make:
Varian
Equipment Model:
M 2 i
Type:
Sputtering System
Wafer Size:
6", 8"
Equipment Configuration:
– Deposition magnet type: U3 or U5 magnet
– Automatic, cassette-to-cassette wafer handling (6″ metal cassette)
– 25 slot metal cassette (2ea)
– Rough pump: iQDP80 (3ea)
– CTI 8F on board Cryo Pump with manual & auto regeneration (5 system)
– CTI 9600 comp
Equipment Pictures:
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Added: October 9, 2020
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Views: 516