Nikon NSR 1505 G 7 E Stepper Sold
Asset # :
55515
Equipment Make:
Nikon
Equipment Model:
NSR 1505 G 7 E
Type:
Stepper
Wafer Size:
6"
Equipment Configuration:
– Lens distortion within ±100nm (including magnification error)
– Open flame (max. exposure area): square 15.0mm (vertical 17.5mm / horizontal 12.5mm)
– Focus check date within ≤ +/-0.3um
– Lamp power 500 mW/cm2
– Lamp uniformity within 3.0%
– Dose contro
Equipment Pictures:
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Added: October 9, 2020
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Views: 641