KLA Tencor Prometrix RS 35 C 4 Point Probe Sold
Asset # :
55514
Equipment Make:
KLA-Tencor
Equipment Model:
Prometrix RS 35 C
Type:
4 Point Probe
Wafer Size:
2", 3", 3.25", 4", 5", 6", 8"
Equipment Configuration:
– 115/230V, 8A, 50/60Hz
– Vacuum: 300 mmHG
– Hard Disk & PC (original 20 Mb, upgraded to 116Mb)
– Color monitor
– Average, difference, and ratio maps
– Calibration curves and correlation equations
– Trend and SQC charts
– Data import & export
– ASCII copy
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Added: October 9, 2020
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Views: 500