Nikon NSR 2205 i 14 E 2 Stepper

Asset # : 55466
Equipment Make: Nikon
Equipment Model: NSR 2205 i 14 E 2
Type: Stepper
Wafer Size: 8"
Equipment Configuration:

Magnification: 1/5 Reduction
Light-source: I-line 365 nm
Resolution: 0.35 um
Lens NA: 0.50 ~ 0.63 (Variable)
Exposure filed size: 22 mq
Bellows control
Lens adjuster: Micrometer / PIEZO / Washer
Lamp: 2.5 kW Hg
PC Type: DMCC
No UPS
Reticle size, 6″
Reticl
Equipment Pictures:
Download Images

Send BTG Message:

Inquire

Ad Details

  • Added: October 9, 2020

  • Views: 167

Description

Tags :