CHA Mark 50 Thermal Evaporator

Asset # : 55358

Equipment Make: CHA

Equipment Model: Mark 50

Type: Thermal Evaporator

Wafer Size:

Equipment Configuration:

– Power Supply: 208VAC, 64KVA, 60Hz, 3phase
– Process gas lines: Process N2, Ar PCW ~10 GPM @ 70F
– Vacuum system controlled by PLC system, Siemens Simatic S7-300
– Rough Vacuum: Edwards E2M-80 FSPX
– High Vacuum: CTI On-Board 400 Cryopump, CTI 9600 comp

Equipment Pictures: