Lam Rainbow 4520 Oxide Etch
Asset # :
55145
Equipment Make:
Lam
Equipment Model:
Rainbow 4520
Type:
Oxide Etch
Wafer Size:
8"
Equipment Configuration:
– EnVision Software v 1.4.6
– Gas Supplies: He, O2, N2, Ar, CF4, CHF3
– Clamp Type
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Added: October 9, 2020
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Views: 946