Lam Rainbow 4520 Oxide Etch

Asset # : 55145
Equipment Make: Lam
Equipment Model: Rainbow 4520
Type: Oxide Etch
Wafer Size: 8"
Equipment Configuration:

– EnVision Software v 1.4.6
– Gas Supplies: He, O2, N2, Ar, CF4, CHF3
– Clamp Type

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  • Added: October 9, 2020

  • Views: 110

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