Lam 2300 E Coronus Bevel Metal Etch Sold

Asset # : 55135
Equipment Make: Lam
Equipment Model: 2300 E Coronus
Type: Bevel Metal Etch
Wafer Size: 12"
Equipment Configuration:

– Single Chamber
– 25 Slot Cassette
– Process Module: Coronus HP
– Chamber Type: Heated
– RF Match: Fixed RF Match
– Cooling System: TCU with Interface Box
– Gas Box: Standard Gas Containment
– HP Jetstream – Enhanced Heated Lines
– Software system
Platform:
– EFEM
– Front End Load Port Cassette
– Cassette ID
– Wafer Aligner
– User Interface Options System UPS – Circuitry
– Signal Tower
– Backing Pumps

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  • Added: October 9, 2020

  • Views: 196

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