Tel Alpha 8 S Z Furnace
Asset # :
54990
Equipment Make:
Tel
Equipment Model:
Alpha 8 S Z
Type:
Furnace
Wafer Size:
8"
Equipment Configuration:
– Main Controller: Waves
– Pyro Process
– Gases: N2, O2, H2, HCl
– Heater: VOS 40 107 (FTP)
Equipment Pictures:
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Added: October 9, 2020
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Views: 299